RTP 2010 - 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP 2010)

Website http://www.ieee-rtp.org/ | Edit Freely

Category RTP 2010

Deadline: May 31, 2010 | Date: September 28, 2010

Venue/Country: Gainesville, U.S.A

Updated: 2010-06-04 19:32:22 (GMT+9)

Call For Papers - CFP

18th IEEE Conference on Advanced Thermal Processing of Semiconductors

IEEE RTP 2010

Hilton University of Florida Conference Center in Gainesville

September 28 - October 1, 2010

Conference Chair:

Bo Lojek

ATMEL

Regional Chairs:

Europe America Far East

Erik Rosseel Jeff Gelpey Masayasu Tanjyo

IMEC Mattson Technology Nissin Ion Equipment

IEEE RTP'2010 is a conference for engineers, scientists, managers and marketing specialists working in thermal processing of semiconductors, manufacturing, simulation and equipment development. The goal is to provide a comprehensive overview of current and future directions of thermal processing technology and processing systems. The primary emphasis will be on the state-of-the-art tools and RTP and Furnace concepts and methods as they apply to commercial ULSI processing. Papers are sought in the following areas:

Thermal Processing of Nanomaterials and Nanostructures

Advanced Dielectric Formation and RTPCVD

Diffusion, Dopant Activation and Junction Formation

Application of Thermal Processes to Front and Back End Manufacturing

RTP and Advanced Thermal Processing Equipment

Temperature Measurement and Control

Heat Transfer in Microstructures

Modeling and Simulation of Thermal Processes

Strategies for RTP and Furnace Processing in the Manufacturing Environment

All submissions should include title, list of authors with affiliations, and an abstract not exceeding 300 words. Abstracts should be submitted electronically as a Microsoft Word or Adobe PDF document. To submit a paper, please follow instructions in the folder Submit Abstract. Accepted papers will be published in the archival conference proceeding, with no page limit.

DEADLINE FOR ABSTRACT SUBMISSIONS IS MAY 31, 2010.

All correspondence should be addressed to any member of the Conference Steering Committee or to:

IEEE RTP 2010 Conference

http://www.IEEE-RTP.org