PHOTOMASK JAPAN 2011 - 18th international symposium on photomasks and NGL masks
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Website www.photomask-japan.org |
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Category PHOTOMASK JAPAN 2011
Deadline: November 30, 2010 | Date: April 13, 2011-April 15, 2011
Venue/Country: Yokohama, Japan
Updated: 2010-07-30 13:47:35 (GMT+9)
Call For Papers - CFP
Photomask Japan 2011 is the 18th international symposium on photomasks and NGL masks in Japan. The aim of the symposium is to bring together engineers and investigators from Japan, USA, and all over the world in the field of photomasks, NGL masks, and related technologies to discuss recent progress, applications, and future trends. The conference program will feature invited papers, contributed papers, poster sessions, and a rump session with panel discussion. Display opportunities will be provided to mask manufacturing materials, and equipment companies.TopicsMaterials of and for PhotomasksFabrication Process Steps and Equipments for Photomasks (process and equipments for developing, etching, cleaning etc.)Photomask Writing Tools and TechnologiesMetrology Tools and TechnologiesInspection Tools and TechnologiesRepairing Tools and TechnologiesMask Data PreparationsEDA and DFM for PhotomaskPhotomasks with RET: PSM, Masks with OPCPhotomask-relating Lithography TechnologiesNGL Masks: EUV, Nano-imprint ML2 etc.Mask Strategies and Business Challenges: Cost, Cycle-Time etc.
Keywords: Accepted papers list. Acceptance Rate. EI Compendex. Engineering Index. ISTP index. ISI index. Impact Factor.
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